Figure 5 depicts the calculation results of the 2D X-Z cross section. At 100 μs and 200 μs, the fluid injection orifice did not completely fill the chamber. This may be because the size of the single-channel injection cavity was unsuitable for the highest operating frequency of 10 KHz. Thus, subsequent calculation simulations employed 5 KHz as the reference operating frequency. The calculation simulation results were calculated according to the operating frequency of the impact. Figure 6 illustrates the injection cavity height as 60 μm and 30 μm and reveals the 2D X-Y cross section. At 100 μs and 200 μs, the fluid injection orifice did not completely fill the chamber. In those stages, the fluid was still filling the chamber, and the flow field was not yet stable.

Figure 5 depicts the calculation results of the 2D X-Z cross section. At 100 μs and 200 μs, the fluid injection orifice did not completely fill the chamber. This may be because the size of the single-channel injection cavity was unsuitable for the highest operating frequency of 10 KHz. Thus, subsequent calculation simulations employed 5 KHz as the reference operating frequency. The calculation simulation results were calculated according to the operating frequency of the impact. Figure 6 illustrates the injection cavity height as 60 μm and 30 μm and reveals the 2D X-Y cross section. At 100 μs and 200 μs, the fluid injection orifice did not completely fill the chamber. In those stages, the fluid was still filling the chamber, and the flow field was not yet stable.